
19ÒÚÔª£¬ÕâÊÇÈç½ñÈ«Çò×î¹óµç×ÓÉ豸µÄ¼Û¸ñ£¬Ëü¾ÍÊÇÈ«Çò×î´óµÄ¹â¿Ì»ú¹©Ó¦ÉÌASMLÏÈÊÖµÄNA 0.55¸ßÊýÖµ¿×¾¶EUV¹â¿Ì»úµÄ¼Û¸ñ£¬¶ø¹ºÂòÕßÔòÊÇ´óÃû¶¦¶¦µÄÓ¢Ìضû¡£
ÔÚµ±Ç°NA 0.33µÄEUV¹â¿Ì»úÖУ¬Ó¢Ìضû¶¯×÷ÂýÁË£¬±»Ì¨»ýµç¡¢ÈýÐÇÇÀÏÈ£¬Òò´Ë£¬ÔÚÏÂÒ»´úNA 0.55µÄEUV¹â¿Ì¹¤ÒÕÖУ¬Ó¢Ìضû²»ÔÊÐíͬÑùµÄ´íÎóÔٴη¢Éú£¬ÕâÒ»´ÎÒªÇÀÏÈÈýÐÇ̨»ýµçϵ¥£¬Ò²»áÇÀÏÈÁ¿²ú20A¼°18A¹¤ÒÕ£¬Ê״νøÈë°£Ã×¼¶¹¤Òսڵ㡣
»ùÓÚ´Ë£¬4ÄêÀ´Ó¢Ìضûʵ¼ÊÉÏÒѾϵ¥ÁË6̨NA 0.55µÄEUV¹â¿Ì»ú£¬ÆäÖзÖΪÁ½ÖÖ£¬Twinscan Exe:5000ϵÁÐÖ÷ÒªÓÃÓÚ¹¤ÒÕÑз¢£¬²úÄÜÊä³öÊÇ185WPH£¬Ã¿Ð¡Ê±Éú²ú185Ƭ¾§Ô²£¬2023ÄêÉÏ°ëÄê½»¸¶¡£Á¿²úÐ͵ÄNA 0.55¹â¿Ì»úÊÇTwinscan Exe:5200£¬²úÄÜÌáÉýµ½200WPH£¬Ã¿Ð¡Ê±200Ƭ¾§Ô²£¬Ô¤¼Æ»áÔÚ2024ÄêÏÂÏß¡£
±¾ÎÄÊôÓÚÔ´´ÎÄÕ£¬ÈçÈôתÔØ£¬Çë×¢Ã÷À´Ô´£ºÊÀ½çÉÏ×î¹óµÄµç×ÓÓ²¼þÉ豸 µ¥¼Û¾ÍÒª19ÒÚhttps://nb.zol.com.cn/785/7858160.html